Fabrication of arrays of artificial hairs for complex flow pattern recognition
نویسندگان
چکیده
We present monolithically integrated high-density arrays of artificial hairs for flow pattern measurements based on drag force. A combined bulk/surface micromachining process has been developed to integrate the artificial hairs with capacitive read-out. First fabrication results show the possibility to fabricate out-of-plane hairs without reverting to micro-assembly technologies. This enables realisation of high-density arrays of symmetrical sensors with twodimensional sensitivity.
منابع مشابه
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تاریخ انتشار 2003